Waterproof 3-axis cylindrical coordinate robot SWHR3156 series
Optimal for wafer transport in an acidic or alkaline atmosphere during the LSI manufacturing process.
The waterproof 3-axis cylindrical coordinate robot SWHR3156 series is compatible with 300mm wafers and features a flip + edge grip function. With an IP64 protection rating, it is suitable for wafer transport in acidic and alkaline environments during the LSI manufacturing process. It transports wafers at high speed and high precision through S-curve acceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
- Company：ジェーイーエル
- Price：Other
